controller
ENI Model LPG-6A
ENI MW controller MHC1013
ENI RF generator (RPG-50 quanta-10 OEM-200 DCG-100)
ENI power systems OEM-12
MKS 600series pressure controller
MKS 1036564-001 exaust throttle valve
MKS control valve(253B 683B)
MKS PR4000
MKS T3B high-speed exaust throttle valve
MKS TYPE152 automatic pressure controller
MKS TYPE153 control valve
MKS TYPE683 control valve
MKS TYPE652 self-tuning pressure controller
ULVAC CRTM-9000
ULVAC DC power supply
ULVAC GUN control(EGC-16H EGC-10G)
ULVAC ionization vacuum gauge controller GI-D3
ULVAC PIRANI Vacuum gauge control GP-2TRY
ULVAC GUN control(HP-1610F)
ULVAC quadrupole mass analyzer(massmate-100)
ULVAC RF power controller(RFP1A RFP-30CA RFP-05CA)
ULVAC thermal controller HPC-5000
ULVAC thermal program controller HPC-7000
ULVAC vacuum gauge control(PION 0302)
VAT adaptive pressure controller